Publication | Closed Access
Modelling and experimental investigation on nanometric cutting of monocrystalline silicon
256
Citations
31
References
2005
Year
Materials ScienceEngineeringMaterial ProcessingMicrofabricationMaterial MachiningMechanical EngineeringFabrication TechniqueMachine ToolManufacturing EngineeringMonocrystalline SiliconMicroelectronicsMicrostructure
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