Ultraprecision Surface Grinding of Chemical Vapor Deposited Silicon Carbide for X-Ray Mirrors Using Resinoid-Bonded Diamond Wheels

Yoshiharu Namba, Hiroto Kobayashi, Hirofumi Suzuki, K. Yamashita, Nobuhiko Taniguchi

CIRP Annals · 1999 · 38 citations · 9 references

Concepts

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