Triphenylsulfonium salt methacrylate bound polymer resist for electron beam lithography

Nanolithography and Nanochemistry: Probe‐Related Patterning Techniques and Chemical Modification for Nanometer‐Sized Devices

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Natural Sciences, Materials Engineering, Materials Science +15

Chemical amplification mechanisms for microlithography

Elsa Reichmanis, Francis M. Houlihan, Omkaram Nalamasu et al. · Chemistry of Materials · 1991 · 210 citations

Natural Sciences, Chemistry, Materials Science +7

Fabrication and Replication of Polymer Integrated Optical Devices Using Electron-Beam Lithography and Soft Lithography

Yanyi Huang, George T. Paloczi, Amnon Yariv et al. · The Journal of Physical Chemistry B · 2004 · 108 citations

Engineering, Manufacturing Engineering, Materials Engineering +17

Highly Conducting Patterned Pd Nanowires by Direct-Write Electron Beam Lithography

Thiruvelu Bhuvana, Giridhar U. Kulkarni · ACS Nano · 2008 · 99 citations

Natural Sciences, Materials Engineering, Materials Science +14

High-resolution pattern generation using the epoxy novolak SU-8 2000 resist by electron beam lithography

Mirwais Aktary, Martin O. Jensen, K. L. Westra et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 70 citations

Engineering, Materials Engineering, Materials Science +13