Concepedia

Publication | Closed Access

Modelling the dynamics of a MEMS resonator: Simulations and experiments

DOI

193

Citations

13

References

2007

Year

Rob Mestrom, R.H.B. Fey, J.T.M. van Beek, K.L. Phan, Henk Nijmeijer
Sensors and Actuators A Physical

References

YearCitations

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