High rate reactive sputtering process control

Very high rate reactive sputtering of TiN, ZrN and HfN

William D. Sproul · Thin Solid Films · 1983 · 155 citations

Natural Sciences, Materials Engineering, Materials Science +11

Quantitative auger electron analysis of titanium nitrides

P. T. Dawson, K.K. Tzatzov · Surface Science · 1985 · 137 citations

Natural Sciences, Chemistry, Materials Science +13

Physics and chemistry of protective coatings

W.D. Sproul, Jonathan Greene, J.A. Thornton · OSTI OAI (U.S. Department of Energy Office of Scientific and Technical Information) · 1986 · 118 citations

Natural Sciences, Materials Engineering, Materials Science +16

High rate reactively sputtered TiN coatings on high speed steel drills

William D. Sproul, Robert A. Rothstein · Thin Solid Films · 1985 · 108 citations

Engineering, Materials Engineering, Materials Science +10

Practical surface analysis: state of the art and recent developments in AES, XPS, ISS and SIMS

S. Hofmann · Surface and Interface Analysis · 1986 · 106 citations

Natural Sciences, Chemistry, Materials Science +17