Proton beam writing: a tool for high-aspect ratio mask production

A Monte Carlo computer program for the transport of energetic ions in amorphous targets

J.P. Biersack, L.G. Haggmark · Nuclear Instruments and Methods · 1980 · 4.7K citations

Engineering, Materials Science, Physics +16

The radial distribution of dose around the path of a heavy ion in liquid water

M.P.R. Waligórski, R. N. Hamm, Robert Katz · International Journal of Radiation Applications and Instrumentation Part D Nuclear Tracks and Radiation Measurements · 1986 · 514 citations

Medicine, Toxicology, Radiation Dosimetry +14

The National University of Singapore high energy ion nano-probe facility: Performance tests

F. Watt, J.A. van Kan, I. Rajta et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2003 · 175 citations

Engineering, Nuclear Engineering, Instrumentation +7

Three-dimensional nanolithography using proton beam writing

J.A. van Kan, Andrew A. Bettiol, F. Watt · Applied Physics Letters · 2003 · 160 citations

Engineering, Materials Engineering, Materials Science +17

Fabrication of high aspect ratio 100nm metallic stamps for nanoimprint lithography using proton beam writing

K. Ansari, J.A. van Kan, Andrew A. Bettiol et al. · Applied Physics Letters · 2004 · 107 citations

Engineering, Materials Engineering, Materials Science +15