Vertical GaN-Based Trench Gate Metal Oxide Semiconductor Field-Effect Transistors on GaN Bulk Substrates

Abstract

Completely vertical trench gate metal oxide semiconductor field-effect transistors (MOSFETs) have been produced using gallium nitride (GaN) for the first time. These MOSFETs exhibited enhancement-mode operation with a threshold voltage of 3.7 V and an on-resistance of 9.3 mΩ·cm2. The channel mobility was estimated to be 131 cm2/(V·s) when all the resistances except for that of the channel are considered. Such structures, which satisfy the key words "vertical", "trench gate", and "MOSFET", will enable us to fabricate practical GaN-based power switching devices.