Method for modulating the wafer bow of free-standing GaN substrates via inductively coupled plasma etching

Kuei-Ming Chen, Yen-Hsien Yeh, Yin-Hao Wu, Chen-Hao Chiang, Din-Ru Yang, Tung-Wei Chi, Yen-Hsang Fang, Jenq-Dar Tsay, Wei‐I Lee

Journal of Crystal Growth · 2010 · 13 citations · 19 references

Concepts

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