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Kuei-Ming Chen

KC

1

Publications

13

Citations

1

H-Index

2010

Active since

Affiliations

Industrial Technology Research Institute(Current)

Kuei-Ming Chen is an author at Industrial Technology Research Institute specializing in applied physics, engineering, and electrical engineering.

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Publications per year

2010–2010

1

Publications

1

Method for modulating the wafer bow of free-standing GaN substrates via inductively coupled plasma etching

Kuei-Ming Chen, Yen-Hsien Yeh, Yin-Hao Wu et al. · Journal of Crystal Growth · 2010 · 13 citations

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