Concepedia

Monitoring wafer cleanliness and metal contamination via VPD ICP-MS: Case studies for next generation requirements

Meredith Beebe, Scott L. Anderson

Microelectronic Engineering · 2009 · 15 citations · 1 references

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References

1

Collection Efficiency of Metallic Contaminants on Si Wafer by Vapor-Phase Decomposition-Droplet Collection

Hye-Young Chung, Younghun Kim, Hyo-Yong Cho et al. · Analytical Sciences · 2001 · 27 citations

, , +17