Concepedia

Argon incorporation effects on the conductivity of metal layers

Valérie Stambouli, O. Burat, D. Bouchier, F. Meyer, Jean-Paul Gilles, G. Gautherin

Thin Solid Films · 1990 · 22 citations · 16 references

DOI

Concepts

References

16

Electrical-Resistivity Model for Polycrystalline Films: the Case of Arbitrary Reflection at External Surfaces

A. F. Mayadas, M. Shatzkes · Physical review. B, Solid state · 1970 · 2.2K citations

, , +17

Theory of thin-film orientation by ion bombardment during deposition

R. Mark Bradley, James Harper, D. A. Smith · Journal of Applied Physics · 1986 · 236 citations

, , +15

Microstructure, growth, resistivity, and stresses in thin tungsten films deposited by rf sputtering

P. M. Petroff, T. T. Sheng, A. K. Sinha et al. · Journal of Applied Physics · 1973 · 235 citations

, , +17

Effect of ion bombardment during deposition on thick metal and ceramic deposits

Robert D. Bland, G. J. Kominiak, D.M. Mattox · Journal of Vacuum Science and Technology · 1974 · 200 citations

, , +16

Temperature and thickness dependence of the resistivity of thin polycrystalline aluminium, cobalt, nickel, palladium, silver and gold films

J.W.C. de Vries · Thin Solid Films · 1988 · 154 citations

, , +16