Concepedia

High current FIB system for micromechanics application

L. Bischoff, E. Hesse, Gernot Hofmann, F.K. Naefring, Wolfgang Probst, Bernd Schmidt, J. Teichert

Microelectronic Engineering · 1993 · 13 citations · 2 references

DOI

Concepts

References

2

Focused ion beam technology and applications

J. Melngailis · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 611 citations

, , +11

Focused ion beam system with high current density

L. Bischoff, E. Hesse, D. Janssen et al. · Microelectronic Engineering · 1991 · 20 citations

, , +8