Reactive deposition of tin films using an unbalanced magnetron

An introduction to plasma physics

Journal of the Franklin Institute · 1963 · 1.4K citations

Natural Sciences, Physics, Plasma Physics +16

The relationship between hardness and scratch adhession

P. J. Burnett, D.S. Rickerby · Thin Solid Films · 1987 · 571 citations

Engineering, Materials Engineering, Materials Science +10

Charged particle fluxes from planar magnetron sputtering sources

B. Window, N. Savvides · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1986 · 419 citations

Natural Sciences, Electrical Engineering, Physics +13

Microstructure modification of TiN by ion bombardment during reactive sputter deposition

I. Petrov, Lars Hultman, Ulf Helmersson et al. · Thin Solid Films · 1989 · 327 citations

Natural Sciences, Materials Engineering, Materials Science +16

Introduction to plasma physics

C. J. H. Watson · 1974 · 315 citations

Natural Sciences, Physics, Electromagnetism +8