SID Symposium Digest of Technical Papers · 2003 · 15 citations · 1 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationOrganic ChemistryThin FilmsOrganic SemiconductorsProcess SimulationThin-film DepositionNumerical Modeling
Abstract The current status of the development of Organic Vapor Phase Deposition technology (OVPD) for the manufacturing of OLEDs will be reviewed. The basic OVPD principle is explained and typical performance data will be presented. Starting from a small scale R&D setup, the development of larger OVPD systems up to the first mass production unit is described. Special emphasis is put on the scalability of the process. The successful up‐scaling of the OVPD principle is supported by extensive numerical modeling that is also described.
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