Analysis of formulas for calculating the main characteristics of backscattered electrons and how they compare to experimental results

Abstract

Semiempirical relations for the following basic parameters of backscattered electrons in a scanning electron microscope are derived: reflection coefficient; average and most probable energies; energy spectra; and energy of backscattered electrons, depending on the angle of exit. The energy dependence is shown to have a maximum in the angular region of backscattered electrons Θ = 65°–75°.