Atomic layer deposition of BN thin films - Concepedia

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Atomic layer deposition of BN thin films

58

Citations

18

References

2002

Year

Björn Mårlid, Mikael Ottosson, U. Pettersson, Karin Larsson, Jan‐Otto Carlsson

Thin Solid Films

Materials ScienceEngineeringSurface ScienceApplied PhysicsThin FilmsBn Thin FilmsChemical DepositionThin Film Processing

References

	Year	Citations

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