Publication | Open Access
Three-dimensional macroporous silicon photonic crystal with large photonic band gap
89
Citations
16
References
2004
Year
Materials SciencePhotonicsPhotonic DevicePhotonic SensorEngineeringPhysicsThree-dimensional Photonic CrystalsOptical PropertiesApplied PhysicsReflection MeasurementsPhotonic Integrated CircuitMicro-optical ComponentSilicon On InsulatorMacroporous SiliconOptoelectronicsPhotonic Crystals
Three-dimensional photonic crystals based on macroporous silicon are fabricated by photoelectrochemical etching and subsequent focused-ion-beam drilling. Reflection measurements show a high reflection in the range of the stopgap and indicate the spectral position of the complete photonic band gap. The onset of diffraction which might influence the measurement is discussed.
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