Publication | Closed Access
A novel method of fabricating ZnO/diamond/Si multilayers for surface acoustic wave (SAW) device applications
60
Citations
8
References
2002
Year
Materials ScienceMaterials EngineeringSurface Acoustic WaveDevice ApplicationsEngineeringMicrofabricationPhysical AcousticAcoustic MetamaterialApplied PhysicsAcoustic MaterialAcoustic SensorZno/diamond/si MultilayersMicromachined Ultrasonic Transducer
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