Concepedia

Hybrid HIPIMS and DC magnetron sputtering deposition of TiN coatings: Deposition rate, structure and tribological properties

Quanshun Luo, Shicai Yang, Kevin Cooke

Surface and Coatings Technology · 2013 · 104 citations · 45 references

DOI

Concepts

References

45

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1.1K citations

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Effects of strain energy on the preferred orientation of TiN thin films

U Oh, Jung Ho Je · Journal of Applied Physics · 1993 · 407 citations · Full text

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Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering

J. E. Greene, J.‐E. Sundgren, Lars Hultman et al. · Applied Physics Letters · 1995 · 395 citations

, , +15

Average energy deposited per atom: A universal parameter for describing ion-assisted film growth?

I. Petrov, F. Adibi, J. E. Greene et al. · Applied Physics Letters · 1993 · 224 citations

, , +15

Residual stresses in PVD hard coatings

H. Oettel, Regina Wiedemann · Surface and Coatings Technology · 1995 · 214 citations

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