Hybrid HIPIMS and DC magnetron sputtering deposition of TiN coatings: Deposition rate, structure and tribological properties

A novel pulsed magnetron sputter technique utilizing very high target power densities

V. Kouznetsov, K. Macák, Jochen M. Schneider et al. · Surface and Coatings Technology · 1999 · 1K citations

Electrical Engineering, Engineering, Magnetron Sputter Technique +3

Effects of strain energy on the preferred orientation of TiN thin films

U Oh, Jung Ho Je · Journal of Applied Physics · 1993 · 400 citations · Full text

Materials Science, Materials Engineering, Material Analysis +14

Development of preferred orientation in polycrystalline TiN layers grown by ultrahigh vacuum reactive magnetron sputtering

J. E. Greene, J.‐E. Sundgren, Lars Hultman et al. · Applied Physics Letters · 1995 · 392 citations

Materials Science, Magnetism, Materials Engineering +15

Average energy deposited per atom: A universal parameter for describing ion-assisted film growth?

I. Petrov, F. Adibi, J. E. Greene et al. · Applied Physics Letters · 1993 · 223 citations

Engineering, Ion-assisted Film Growth, Chemistry +23

Residual stresses in PVD hard coatings

H. Oettel, Regina Wiedemann · Surface and Coatings Technology · 1995 · 209 citations

Materials Science, Tribological Coating, Engineering +4