A 60GHz CMOS VCO Using On-Chip Resonator with Embedded Artificial Dielectric for Size, Loss and Noise Reduction

Abstract

An on-chip resonator with artificial dielectric in place of the LC tank yields reduced metal/substrate losses, higher resonator Q and alambda/4 length reduction of 4.7 times. The VCO uses 90nm CMOS, with 0.015mm <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sup> area, consumes 1.9mW and has a measured phase noise of -100dBc/Hz at 1MHz offset. The FOM is -193dBc/Hz