Thin Solid Films · 2005 · 68 citations · 15 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsChemical Vapor DepositionCoating TechnologyCoatingsMaterial FilmThin-film DepositionThin-film MaterialsChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsTitanium MaterialsTitanium Oxides
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J. F. Scott, Carlos A. Paz de Araújo · Science · 1989 · 3.8K citations
Natural Sciences, Electrical Engineering, Materials Science +17