Application of diamond-like layers as gate dielectric in metal/insulator/semiconductor transistor

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

S. Aisenberg, Ronald Chabot · Journal of Applied Physics · 1971 · 1.2K citations

Natural Sciences, Materials Engineering, Thin Films +1

Preparation and properties of hard i-C and i-BN coatings

K. Bewilogua, Klaus Breuer, D. Dietrich et al. · Thin Solid Films · 1982 · 252 citations

Natural Sciences, Materials Engineering, Materials Science +12

Some new results on the fabrication of and the mechanical, electrical and optical properties of i-carbon layers

K. Enke · Thin Solid Films · 1981 · 246 citations

Natural Sciences, Materials Engineering, Materials Science +15

Diamond deposition technologies

Peter K. Bachmann, Willem van Enckevort · Diamond and Related Materials · 1992 · 124 citations

Reactive pulse plasma crystallization of diamond and diamond-like carbon

M. Sokołowski, A. Sokołowska, B. Gokieli et al. · Journal of Crystal Growth · 1979 · 89 citations

Natural Sciences, Materials Engineering, Materials Science +11