Acta Materialia · 1998 · 88 citations · 15 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor MaterialsSurface ScienceElectron MicroscopyLaser Material ProcessingLaser Surface ProcessingSemiconductor SurfacesSurface PhysicsTransmission Electron MicroscopyAtomic-scale Surface ImagingElectron Beam-induced DamageSilicon CarbideSilicon Carbide (Sic) Materials
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