Real-time monitoring and control of epitaxial semiconductor growth in a production environment by in situ spectroscopic ellipsometry - Concepedia

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Real-time monitoring and control of epitaxial semiconductor growth in a production environment by in situ spectroscopic ellipsometry

41

Citations

14

References

1998

Year

Blaine Johs, Craig M. Herzinger, J. H. Dinan, A. Cornfeld, J. D. Benson, D.P. Doctor, G. L. Olson, Ian T. Ferguson, M. Pelczynski, P. P. Chow,

Thin Solid Films

Real-time MonitoringElectrical EngineeringProduction EnvironmentEngineeringSpectroscopyApplied PhysicsSemiconductor Device FabricationMolecular Beam EpitaxyEpitaxial GrowthOptoelectronicsCompound SemiconductorEpitaxial Semiconductor Growth

References

	Year	Citations

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