Concepedia

Publication | Closed Access

Self-annealing characterization of electroplated copper films

DOI

163

Citations

1

References

2000

Year

Sébastien Lagrange, Sywert Brongersma, Moshe Judelewicz, A. Saerens, I. Vervoort, E. Richard, Roger Palmans, Karen Maex
Microelectronic Engineering

References

YearCitations

Page 1