SiCxNy thin films alloys prepared by pulsed excimer laser deposition - Concepedia

Concepedia

Publication | Closed Access

SiCxNy thin films alloys prepared by pulsed excimer laser deposition

44

Citations

6

References

1998

Year

R. Machorro, E. C. Sámano, G. Soto, L. Cota‐Araiza

Applied Surface Science

Materials EngineeringMaterials ScienceAdvanced Laser ProcessingEngineeringApplied PhysicsThin Film Process TechnologyLaser-assisted DepositionThin FilmsPulsed Laser DepositionThin Film ProcessingSicxny Thin Films

References

	Year	Citations

Page 1