Concepedia

SiCxNy thin films alloys prepared by pulsed excimer laser deposition

R. Machorro, E. C. Sámano, G. Soto, L. Cota‐Araiza

Applied Surface Science · 1998 · 44 citations · 6 references

DOI

Concepts

References

6

Prediction of New Low Compressibility Solids

Amy Liu, Marvin L. Cohen · Science · 1989 · 2.7K citations

, , +15

SiCN alloys deposited by electron cyclotron resonance plasma chemical vapor deposition

FRANCISCO J. GORJÓN GÓMEZ, P. Prieto, E. Elizalde et al. · Applied Physics Letters · 1996 · 104 citations

, , +17

Electron spectroscopic identification of carbon species formed during diamond growth

David N. Belton, Steven J. Schmieg · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 96 citations

, , +15

Ellipsometry in Thin Film Analysis

J. B. Theeten, D. E. Aspnes · Annual Review of Materials Science · 1981 · 85 citations

, , +13

XPS characterization of nitrogen implanted silicon carbide

Aiko Nakao, M. Iwaki, Hideo Sakairi et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 50 citations

, , +10