Low temperature oxidation of silicon powders

Optical Measurement of Film Growth on Silicon and Germanium Surfaces in Room Air

R. J. Archer · Journal of The Electrochemical Society · 1957 · 173 citations

Natural Sciences, Materials Science, Physics +16

Oxidation of Si and GaAs in air at room temperature

F. Lukeš · Surface Science · 1972 · 168 citations

Engineering, Materials Engineering, Materials Science +12

Oxidation, Impurity Diffusion, and Defect Growth in Silicon—An Overview

Richard B. Fair · Journal of The Electrochemical Society · 1981 · 82 citations

Natural Sciences, Materials Engineering, Materials Science +17

Kinetics of High Pressure Oxidation of Silicon in Pyrogenic Steam

R. R. Razouk, Liang N. Lie, Bruce E. Deal · Journal of The Electrochemical Society · 1981 · 78 citations

Natural Sciences, Chemistry, Materials Science +17

The Growth and Characterization of Very Thin Silicon Dioxide Films

A. C. Adams, T. E. Smith, C. C. Chang · Journal of The Electrochemical Society · 1980 · 74 citations

Natural Sciences, Materials Engineering, Materials Science +17