Publication | Closed Access
Hypersonic plasma particle deposition of nanostructured silicon and silicon carbide
115
Citations
23
References
1998
Year
Materials ScienceEngineeringNanomaterialsNanotechnologyApplied PhysicsUltrasoundChemical Vapor DepositionNanostructured SiliconPlasma ProcessingPlasma ApplicationCarbide
| Year | Citations | |
|---|---|---|
Page 1
Page 1