Microcantilever-based Sensors

Abstract

Micromachined cantilever platform offers an opportunity for the development and mass production of extremely sensitive low-cost sensors for real time in situ sensing of many chemical, explosives and biological species. These sensors have been used for measuring and detecting various hazardous chemicals, explosives, and biological agents, leading to the development of hand-held labs. In this paper, different geometries of microcantilevers have been analysed, and their performances in terms of deflection and shift in resonance frequency due to additional mass of analyte have been simulated. The results of these studies can be used to increase the sensitivity of these devices. Defence Science Journal, 2009, 59(6), pp.634-641 , DOI:http://dx.doi.org/10.14429/dsj.59.1569