Time-dependent dielectric breakdown of SiO2 films in a wide electric field range - Concepedia

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Time-dependent dielectric breakdown of SiO2 films in a wide electric field range

17

Citations

14

References

2001

Year

Akinobu Teramoto, Hiroshi Umeda, K. Azamawari, K. Kobayashi, Kazumasa Shiga, J. Komori, Yutaka Ohno, A. Shigetomi

Microelectronics Reliability

Electrical EngineeringEngineeringOxide ElectronicsApplied PhysicsTime-dependent Dielectric BreakdownSemiconductor MaterialThin FilmsSilicon On InsulatorSio2 FilmsElectrical PropertyElectrical Insulation

References

	Year	Citations

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