Time-dependent dielectric breakdown of SiO2 films in a wide electric field range

Akinobu Teramoto, Hiroshi Umeda, K. Azamawari, K. Kobayashi, Kazumasa Shiga, J. Komori, Yutaka Ohno, A. Shigetomi

Microelectronics Reliability · 2001 · 17 citations · 14 references

Concepts

References

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