Journal of Electronic Materials · 2014 · 12 citations · 17 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesThin FilmsMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film MaterialsThin-film TransistorsLow-temperature FabricationLow-temperature MaterialsOxide Thin-film TransistorsPyrolysisSpray PyrolysisThin Oxide FilmsThin Oxide Layers
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