An investigation on piezoelectric energy harvesting for MEMS power sources

Jung Woo Sohn, Seung‐Bok Choi, D Y Lee

Proceedings of the Institution of Mechanical Engineers Part C Journal of Mechanical Engineering Science · 2005 · 90 citations · 4 references

Concepts

Abstract

This paper presents the feasibility of using piezoelectric materials in a power source for micro-electro-mechanical systems (MEMS) devices. The finite element method (FEM) is adopted to evaluate the power generations of commercially available piezofilms that are subjected to a fluctuating pressure source (blood pressure). The accuracy of the results obtained from the FEM is verified by comparing with the corresponding results obtained from a theoretical analysis. In addition, an experiment is undertaken in order to evaluate the power generation of two different shapes of the piezofilms: square and circle. Finally, a brief discussion is made on the storage of experimentally harvested power and use of the MEMS applications.

References

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