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Growth of high-quality GaN films on epitaxial AlN/sapphire templates by MOVPE

Materials EngineeringMaterials ScienceAluminium NitrideHigh-quality Gan FilmsEngineeringEpitaxial Aln/sapphire TemplatesApplied PhysicsAluminum Gallium NitrideGan Power DeviceGallium OxideCategoryiii-v Semiconductor