Publication | Closed Access
Selective metalorganic chemical vapor deposition growth of GaAs on AlGaAs combined with in situ HCl gas etching
11
Citations
11
References
1993
Year
Materials EngineeringAluminium NitrideElectrical EngineeringEngineeringSurface ScienceApplied PhysicsMolecular Beam EpitaxyMicroelectronicsOptoelectronicsChemical Vapor DepositionCompound SemiconductorCategoryiii-v Semiconductor
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