Analysis of small deflection touch mode behavior in capacitive pressure sensors

Touch mode capacitive pressure sensors

Wen H. Ko, Qiang Wang · Sensors and Actuators A Physical · 1999 · 238 citations

Engineering, Sensors, Touch User Interface +4

Batch-processed vacuum-sealed capacitive pressure sensors

A.V. Chavan, K.D. Wise · Journal of Microelectromechanical Systems · 2001 · 133 citations

Vacuum-sealed Reference Cavity, Engineering, Electronic Instrumentation +12

A capacitive pressure sensor with low impedance output and active suppression of parasitic effects

Eric Peeters, A. Bossche, Willy Sansen · Sensors and Actuators A Physical · 1990 · 103 citations

Low Impedance Output, Engineering, Sensors +5

Modeling of touch mode capacitive sensors and diaphragms

Qiang Wang, Wen H. Ko · Sensors and Actuators A Physical · 1999 · 87 citations

Engineering, Sensors, Touch User Interface +6

Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance

Thomas Pedersen, Giulio Fragiacomo, Ole Hansen et al. · Sensors and Actuators A Physical · 2009 · 67 citations

Reduced Hysteresis, Engineering, Implantable Sensor +8