Nuclear Instruments and Methods in Physics Research · 1981 · 15 citations · 1 references
EngineeringElectrical EngineeringPlasma PhysicsImplant TechnologyImplant Treatment PlanningImplantable Biomedical DevicesIon ImplantationIonization ProcessesHigh Current Ion ImplantationImplantation-induced Defect FormationIon Beam Profile ControlIon Implantation EffectsIon Implantation SimulationIon Source DesignPlasma Immersion Ion Implantation
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