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Nonlinear Elasticity, Engineering, Elasticity (Physics) +5

Analysis and design of polysilicon thermal flexure actuator

Qing‐An Huang, Neville Ka Shek Lee · Journal of Micromechanics and Microengineering · 1999 · 331 citations

Applications for surface-micromachined polysilicon thermal actuators and arrays

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Engineering, Micromachines, Microfabrication +4

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Engineering, Micromachines, Microfabrication +11

Comprehensive thermal modelling and characterization of an electro-thermal-compliant microactuator

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Engineering, Comprehensive Thermal Model, Mechanical Engineering +20