Concepedia

Hydrogenated Amorphous Silicon Germanium Alloys Prepared by Triode rf Glow Discharge

T. Ichimura, T. Ihara, Toshio Hama, M. Ohsawa, Hiroshi Sakai, Yoshiyuki Uchida

Japanese Journal of Applied Physics · 1986 · 10 citations · 6 references

Abstract

The a-SiGe:H films produced in the triode system possess better photoconductivity, lower density of dangling bond and very sharp Urbach tail as compared with film produced in the conventional diode system. Such superior properties are attributed to their homogeneous structures, as confirmed by hydrogen evolution experiments and TEM observation.

References

6

Photothermal deflection spectroscopy and detection

W. B. Jackson, Nabil M. Amer, Albert‐Claude Boccara et al. · Applied Optics · 1981 · 1.4K citations · Full text

Transient Grating, Sensitive Spectroscopy, Engineering +14

The role of hydrogen in a-Si:H — results of evolution and annealing studies

W. Beyer, H. Wagner · Journal of Non-Crystalline Solids · 1983 · 182 citations

H — Results, Engineering, Physics +4

Urbach tail and gap states in hydrogenated a-SiC and a-SiGe alloys

A. Skumanich, A. Frova, Nabil M. Amer · Solid State Communications · 1985 · 126 citations

Materials Science, Materials Engineering, Engineering +11

ESR and IR Studies on a-Si<sub>1-x</sub>Ge<sub>x</sub>:H Prepared by Glow Discharge Decomposition

Akiharu Morimoto, Takashi Miura, Minoru Kumeda et al. · Japanese Journal of Applied Physics · 1981 · 106 citations

Engineering, Glow Discharge Decomposition, Glow Discharge +19

Preparation of highly photosensitive hydrogenated amorphous Si-Ge alloys using a triode plasma reactor

Akihisa Matsuda, Kiyoshi Yagii, Masato Koyama et al. · Applied Physics Letters · 1985 · 54 citations

Engineering, Optoelectronic Devices, Silicon On Insulator +18