III–V Compound semiconductor micromachined actuators for long resonator tunable fabry-pérot detectors

Alfons Dehé, J. Peerlings, Joachim Pfeiffer, Rolf Riemenschneider, A. Vogt, K. Streubel, H. Künzel, H. L. Hartnagel

Sensors and Actuators A Physical · 1998 · 23 citations · 6 references

Concepts

References

6