Surface and Coatings Technology · 2005 · 27 citations · 10 references
Natural SciencesMaterials EngineeringMaterials ScienceMetallic MaterialsMetallurgyThin FilmsAlloysMetal MaterialsMetalsThin Film Mechanical PropertiesThin-film DepositionThin-film MaterialsMagnesium AlloysMetal Thin FilmsMetallic Thin FilmsSputter DepositionSputteringSputtering ProcessesSputtering Techniques
10
Reactive-sputter-deposited TiN films on glass substrates
Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 744 citations
Natural Sciences, Materials Engineering, Materials Science +14