Surface roughening in ion implanted 4H-silicon carbide - Concepedia

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Surface roughening in ion implanted 4H-silicon carbide

104

Citations

8

References

1999

Year

M. A. Capano, Sei‐Hyung Ryu, James A. Cooper, M. R. Melloch, K. Rottner, Stefan Karlsson, N. Nordell, A. Powell, Dennis E. Walker

Journal of Electronic Materials

Materials ScienceIon ImplantationEngineeringSurface ScienceApplied PhysicsCarbide

References

	Year	Citations

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