Concepedia

Publication | Closed Access

Preparation of SrRuO3 films for advanced CMOS metal gates

DOI

12

Citations

3

References

2004

Year

K. Fröhlich, K. Hušeková, D. Machajdı́k, R. Lupták, M. Ťapajna, Jacob C. Hooker, F. Roozeboom, A.P. Kobzev, Claudia Wiemer, S. Ferrari,
Materials Science in Semiconductor Processing

References

YearCitations

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