Concepedia

Reactive sputtering of simple condensed gases by kev ions III: Kinetic energy distributions

R.A. Haring, R. Pêdrys, D. J. Oostra, A. Haring, A.E. De Vries

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1984 · 58 citations · 14 references

DOI

Concepts

References

14

Theory of Sputtering. I. Sputtering Yield of Amorphous and Polycrystalline Targets

Peter Sigmund · Physical Review · 1969 · 3.5K citations

, , +13

II. The energy spectrum of ejected atoms during the high energy sputtering of gold

M. W. Thompson · Philosophical magazine · 1968 · 1.2K citations

, , +15

Studies of proton-irradiated cometary-type ice mixtures

Marla H. Moore, B. Donn, Raj K. Khanna et al. · Icarus · 1983 · 254 citations

, , +8

On the energy distribution of sputtered clusters

G. P. Können, A. Tip, A.E. De Vries · Radiation Effects · 1975 · 145 citations

, , +11

Electronic sputtering of low temperature molecular solids

W. L. Brown, W. M. Augustyniak, K. J. Marcantonio et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1984 · 140 citations

, , +12