Surface and Coatings Technology · 2008 · 11 citations · 30 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsSurface ScienceThin FilmsResidual StressSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film Mechanical PropertiesThin Film StrainThin-film DepositionFilm StressHexagonal Boron NitrideIon Beam EtchingIon Beam ModificationNitride Thin FilmsNitrides DepositionNitrides Thin Films
30
On the role of ions in the formation of cubic boron nitride films by ion-assisted deposition
Paul B. Mirkarimi, Kevin F. McCarty, Douglas L. Medlin et al. · Journal of materials research/Pratt's guide to venture capital sources · 1994 · 200 citations
Natural Sciences, Materials Engineering, Materials Science +11
Epitaxy of cubic boron nitride on (001)-oriented diamond
X. W. Zhang, H.‐G. Boyen, N. Deyneka et al. · Nature Materials · 2003 · 145 citations
Natural Sciences, Materials Engineering, Materials Science +7