Fabrication of a microlens array using micro-compression molding with an electroformed mold insert

Abstract

Polymeric microlens arrays, with a diameter of 36–96 μm, a radius of curvature of 20–60 μm and a pitch of 250 μm, were fabricated using micro-compression molding with electroformed mold inserts. We used the reflow method and the electroforming process to make the mother and the metallic mold inserts, respectively. Micro-compression molding with powder polymer was developed to replicate microlenses. The surface profiles, imaging qualities, and surface roughness of the microlenses were measured and analyzed.