Nanotechnology · 1996 · 20 citations · 1 references
EngineeringManufacturing EngineeringMechanical EngineeringInstrumentationMetrologyForm MeasurementRapid PrototypingSurface MetrologySurface RoughnessSurface TopographyProfilometryStylus MeasurementStylus ProfilometrySurface ProfilometryThree-dimensional Surface Measurement
This paper describes some of the design aspects of a prototype high-speed stylus profilometer intended primarily for rapid 3D measurement of small surface areas.
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