Concepedia

Publication | Closed Access

Innovatively composite hard mask to feature sub-30nm gate patterning

DOI

12

Citations

15

References

2014

Year

Lingkuan Meng, Chunlong Li, Xiaobin He, Jun Luo, Junfeng Li, Chao Zhao, Yan Jiang
Microelectronic Engineering

References

YearCitations

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