Concepedia

An alternative solution to improve sensitivity of resonant microcantilever chemical sensors: comparison between using high-order modes and reducing dimensions

Frédéric Lochon, Isabelle Dufour, Dominique Rebière

Sensors and Actuators B Chemical · 2005 · 103 citations · 9 references

DOI

Concepts

References

9

Frequency response of cantilever beams immersed in viscous fluids with applications to the atomic force microscope

John E. Sader · Journal of Applied Physics · 1998 · 1.4K citations

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Micromechanical cantilever-based biosensors

Roberto Raiteri, M. Grattarola, Hans‐Jürgen Butt et al. · Sensors and Actuators B Chemical · 2001 · 729 citations

A chemical sensor based on a microfabricated cantilever array with simultaneous resonance-frequency and bending readout

F. Battiston, J.-P. Ramseyer, H.P. Lang et al. · Sensors and Actuators B Chemical · 2001 · 448 citations

, , +17

An analytical model for support loss in micromachined beam resonators with in-plane flexural vibrations

Zhili Hao, A. Erbil, Farrokh Ayazi · Sensors and Actuators A Physical · 2003 · 383 citations

, , +16

Experimental validation of theoretical models for the frequency response of atomic force microscope cantilever beams immersed in fluids

James W. M. Chon, Paul Mulvaney, John E. Sader · Journal of Applied Physics · 2000 · 335 citations · Full text

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