Process parameter selection study on SiNx:H films by PECVD method for silicon solar cells

Effect of deposition conditions on mechanical properties of low-temperature PECVD silicon nitride films

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Natural Sciences, Materials Engineering, Materials Science +16

Fabrication of silicon nitride waveguides for visible-light using PECVD: a study of the effect of plasma frequency on optical properties

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Silicon nitride film for solar cells

A. El Amrani, I. Menous, L. Mahiou et al. · Renewable Energy · 2008 · 66 citations

Engineering, Materials Engineering, Materials Science +14

Microcrystalline silicon films and solar cells deposited by PECVD and HWCVD

Susanne Klein, T. Repmann, T. Brammer · Solar Energy · 2004 · 49 citations

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SiNx deposited by in-line PECVD for multi-crystalline silicon solar cells

Ming-Chun Wei, Shoou‐Jinn Chang, Chi-Yang Tsia et al. · Solar Energy · 2005 · 26 citations

Engineering, Materials Engineering, Materials Science +14