Effects of sputter deposition parameters and post-deposition annealing on the electrical characteristics of LaAlO3 dielectric films on Si - Concepedia

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Effects of sputter deposition parameters and post-deposition annealing on the electrical characteristics of LaAlO3 dielectric films on Si

11

Citations

21

References

2006

Year

V. Edon, M. C. Hugon, B. Agius, L. Miotti, C. Radtke, Francine Tatsch, J.‐J. Ganem, I. Trimaille, I. J. R. Baumvol

Applied Physics A

Materials EngineeringMaterials ScienceElectrical EngineeringLaalo3 Dielectric FilmsSputter Deposition ParametersPost-deposition AnnealingEngineeringEpitaxial GrowthNanoelectronicsApplied PhysicsSemiconductor MaterialThin FilmsSilicon On InsulatorMicroelectronicsThin Film ProcessingElectrical Insulation

References

	Year	Citations

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